Industry
Zedex launches precision inspection device for nano-level processes
Zedex, a company specialising in semiconductor particle control, has developed a device to precisely inspect particles on key semiconductor process components. It launched the M802ESC inspection system for analysing components including electrostatic chucks, sputtering targets and FOUPs. The company said the next-generation model supports nano-level ultrafine processes and can evaluate parts that were difficult to inspect quantitatively. It handles samples up to 610 mm in diameter and loads up to 50 kg.
