Industry
Shinsung E&G reveals dehumidification-static electricity integrated control technology to boost semiconductor yields
Shinsung E&G disclosed a patented technology that controls humidity and static electricity at the same time in semiconductor production equipment. It integrates a dehumidification unit and an ionizer inside an EFM chamber to reduce installation space and address static issues in dry environments. The company said removing external dehumidification equipment and piping reduces overall equipment volume, improves fab space utilisation and can lower manufacturing costs. The ionizer helps prevent particle adhesion without raising fan speed.
